The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 1980
Filed:
Feb. 15, 1979
Applicant:
Inventors:
Susumu Ito, Tokyo, JP;
Morimasa Nagao, Tokyo, JP;
Toshio Yamagata, Tokyo, JP;
Nobuyuki Hayama, Tokyo, JP;
Assignee:
Nippon Electric Company, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73720 ; 73726 ; 338-4 ; 338 / ;
Abstract
A pressure sensor comprises essentially magnetoresistive elements formed on a diaphragm serving as a stress magnifier. The diaphragm may be made, for example, of glass in a thickness of 0.5 millimeter, and the magnetoresistive elements can be formed thereon in any desired pattern of thin stripes by ordinary thin-film techniques. Such sensor elements can be mass produced, e.g., by vapor deposition and etching on a large sheet of diaphragm material and cutting into chips of desired shape and size.