The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 1980
Filed:
Dec. 22, 1978
Robert A Wagner, Manchester, CT (US);
United Technologies Corporation, Hartford, CT (US);
Abstract
An improved SAW pressure sensor structure includes a dual substrate sensor having a SAW substrate with a SAW delay line disposed in an active signal region on a first one of two parallel major surfaces thereof, and having a centrally apertured base substrate of the same material bonded at a mating surface thereof to the second one of the SAW substrate major surfaces with a glass seal, the dual substrates being bonded in crystallographic orientation, the central aperture having segmented portions to provide a major diameter opening at the mating surface coextensive with the active signal region to form a diaphragm and having a minor diameter opening at a second surface of the base substrate at a value less than one half that of the major diameter, the base substrate further including an O-ring groove adapted to receive one end of a cylindrical metal sleeve in a vacuum sealing relationship, the metal sleeve having a diameter equal to one half that of the aperture major diameter, the sleeve being bonded at another end to an orifice formed in one wall of a vacuum sealing enclosure adapted to receive the SAW sensor to provide a fluid conduit for external pressure signals between the orifice and the diaphragm formed in the SAW sensor.