The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 1980
Filed:
Dec. 18, 1978
Applicant:
Inventors:
Takao Namae, Akishimashi, JP;
Teruo Someya, Akishimashi, JP;
Assignee:
Nihon Denshi Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M / ;
U.S. Cl.
CPC ...
250311 ; 2503 / ;
Abstract
In a scanning electron microscope, a circle of least confusion of the electron beam is formed on a specimen without operation of a stigmator, then the circle of least confusion is minimized by a stigmator, thereby enabling lens astigmatism in said microscope to be fully corrected.