The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 1980
Filed:
Mar. 29, 1979
Applicant:
Inventor:
Larry D Hartsough, Berkeley, CA (US);
Assignee:
The Perkin-Elmer Corporation, Norwalk, CT (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041 / ; 204298 ;
Abstract
An improved method and apparatus for attaching a target to the cathode of a cathode sputtering system is disclosed which includes a ferromagnetic retainer which releasably clamps the target to the cathode by virtue of its attraction to existing permanent magnets in the cathode assembly. An optional ferromagnetic ring may also be provided around the periphery of the target to further hold the target to the cathode assembly.