The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 1980
Filed:
Jul. 28, 1978
Malvin D Terry, Phoenix, AZ (US);
Advanced Semiconductor Materials/America, Phoenix, AZ (US);
Abstract
An automatic four-point probe mechanism, containing various sensors, motors, and precision machine parts necessary to accurately and repeatedly lower a four-point resistivity head onto a semi-conductor slice surface is ideally suited for operator independent measurements of semi-conductor resistivity. The automatic four-point probe finds application in quality assurance incoming-outgoing inspections, materials process control, epitaxial in-process control, diffusion in-process control, thin-film process control, and similar applications. In the preferred embodiment, all torsional forces are eliminated from the probe head, thus avoiding scratch damage to the semi-conductor surface and providing for uniform depth penetration of the probe into the semi-conductor surface and great repeatability of test readings.