The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 1980
Filed:
May. 23, 1978
Barbara E Sumner, Washington, DC (US);
The United States of America as represented by the Secretary of the Army, Washington, DC (US);
Abstract
A crystal substrate of <111> silicon is doped by being exposed to a liquid etal solvent. The substrate is carried in a cavity in a refractory boat, and the solvent is carried in a perforation of a cover for the boat. The boat is heated to a certain temperature in a non-oxidizing atmosphere and is moved to place the substrate cavity under the cover perforation whereby the solvent and substrate come in contact. The temperature is raised and held to allow the desired substrate-solvent solution to form, then is reduced and held to allow supersaturation and eventually precipitation of the doped substrate. The boat is next moved to remove the cavity from beneath the perforation, is allowed to cool to room ambient, and is removed from the non-oxidizing atmosphere. The doped substrate is then cleaned as desired to remove any attached solvent.