The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 1980

Filed:

Nov. 06, 1978
Applicant:
Inventors:

Bruno Blanchard, Grenoble, FR;

Patrick Carrier, Saint Egreve, FR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ; H01J / ;
U.S. Cl.
CPC ...
250288 ; 2504 / ;
Abstract

A metal vapor source with a regulatable flow rate comprising an enclosure filled with said vapor, means for heating said enclosure to a first temperature, a tube connected to the enclosure and means for heating said tube to a second regulatable temperature, the first temperature being maintained above the second temperature. An ion analyzer comprising an enclosure in which is disposed a target to be analyzed, a lens for extracting secondary ions whose front face faces the target, an enclosure filled with an alkaline vapor, means for heating said enclosure to a first regulatable temperature, a vapor outflow tube connected to one end of the enclosure, while the other end penetrates the analyzer enclosure, traverses the extraction lens and assumes a position level with the front face of the extraction lens and means for heating said tube to a second regulatable temperature, the first temperature being kept above the second temperature of the outflow tube.


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