The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 1980
Filed:
Apr. 10, 1978
Harold G Parks, Scotia, NY (US);
General Electric Company, Schenectady, NY (US);
Abstract
Electron optics apparatus, for use in electron-beam lithography, electron-beam-addressable memory tubes and the like, utilizes a tri-potential collimating condenser lens and a multi-element matrix lens of the 'flys eye' type with coarse deflection elements positioned therebetween to deflect the collimated electron beam from the condenser lens to the appropriate aperture in the matrix of lenslets. The condenser lens electrode and matrix lens electrode closest to one another, as well as the coarse deflection electrodes therebetween, are substantially the only elements in the apparatus which float at a relatively high electrical potential, thereby simplifying the requirements of peripheral circuitry while retaining the advantages of the 'flys eye' matrix lens.