The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 1979
Filed:
Sep. 29, 1978
Aristos Christou, Springfield, VA (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
In a scanning electron beam system wherein a primary beam of electrons is anned over the surface of a specimen and electron images are generated by collecting electrons scattered from the surface, an improved electron collector for selectively collecting the primary electrons that have suffered low loss in being scattered by the surface. Three symmetrically shaped mesh grids are arranged in front of a scintillator in the path of the backscattered electrons. The grids are disposed relative to each other and biased so that the electric fields permit passage of electrons within a narrow energy range. The scintillator is coated with a layer of tantalum and a layer of gold to provide thermal stability and resistance to damage from bombardment by high-energy electrons.