The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 1979
Filed:
Jan. 19, 1978
Applicant:
Inventor:
Vernon R Porter, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25B / ; C25B / ;
U.S. Cl.
CPC ...
204237 ; 204260 ; 204266 ;
Abstract
A system for supplying arsine having automatic arsine monitoring and controls to a semiconductor reactor is described wherein arsine is electrochemically generated from an electrolyte solution such as an inorganic acid and an arsenite salt. The electrolytic cell vessel also comprises the cathode structure. A circular concentric barrier is provided to isolate the oxygen produced at the cathode in an annular region from the arsine generated at the anode located centrally within the cell.
Porter, Vernon. (1979). Apparatus for generation and control of dopant and reactive gases (U.S. Patent No. 4178224). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4178224
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile