The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 1979
Filed:
Dec. 05, 1977
Robert I Beaver, II, Menlo Park, CA (US);
Michael J Adams, San Jose, CA (US);
George L Prodanovich, Campbell, CA (US);
Paul F Key, San Martin, CA (US);
Don O Rawlings, San Jose, CA (US);
P Santhanam, Sunnyvale, CA (US);
Susan L Hunt, Milpitas, CA (US);
Macronetics, Inc., Sunnyvale, CA (US);
Abstract
Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.