The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 1979
Filed:
May. 06, 1977
Applicant:
Inventors:
John H Bruning, Brookside, NJ (US);
Alan D White, Berkeley Heights, NJ (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
350173 ; 350199 ;
Abstract
A compact image projection apparatus comprises a concave spherical mirror, a plano-convex lens, a quarter wave plate and two prisms one of which is a roof prism. The apparatus is such that object and image have the same orientation and are positioned in two parallel planes. The apparatus is located, for example, between a mask and a semiconductor wafer in a scanning projection printing system.