The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 1979
Filed:
Jan. 17, 1978
Applicant:
Inventor:
Akiyoshi Suzki, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356401 ; 356399 ; 250548 ;
Abstract
This invention provides an optical device for detecting the position of a second mark relative to a first mark by optically scanning the first and second marks on a scanning surface. The first and second marks are scanned by a scanning spot light and the reflecting lights from the first and second marks are detected by a photoelectric detector. The relative positions of the first and second marks are computed on the basis of the detected signals.