The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 1979
Filed:
Dec. 08, 1977
Gordon P Hampton, Cupertino, CA (US);
Matheus D Pennings, Los Altos, CA (US);
General Signal Corporation, Stamford, CT (US);
Abstract
A method and apparatus for aligning the streets of a semiconductor wafer for sawing or scribing with a single motion control switch. One end of a street is first aligned with a reticle in the Y-direction with this motion control switch. The wafer is then moved in the X-direction while the operator with the same control switch, controls the rotation of the wafer so as to align the street with the reticle. Automatic Y-direction alignment is provided during this rotation by determining the Y-direction misalignment which occurs from the rotation, and by automatically moving the wafer saw blade assembly in the Y-direction to provide the necessary compensation.