The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 1979
Filed:
Dec. 09, 1977
Applicant:
Inventors:
Oscar R Abolafia, Endwell, NY (US);
John Rasile, Endicott, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ;
U.S. Cl.
CPC ...
156664 ; 156656 ; 156659 ; 252 794 ;
Abstract
Chromium/copper/chromium conductor lines and glass-chromium cermet resistor structures are formed on a substrate by a subtractive etch process in which undercutting of the top chromium layer and changes in the resistivity of the cermet are minimized by etching the chromium with a mixture of a low concentration (about 5 to 20% by volume) of concentrated (37%) HCl in about 65 to 95% by volume of an aliphatic alcohol such as glycerine with the remainder, if any, to make 100% being water at an elevated temperature of from about 50.degree. to 95.degree. C.