The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 22, 1979

Filed:

Jul. 17, 1978
Applicant:
Inventors:

Kunihiko Edamatsu, Kawasaki, JP;

Yasukazu Sano, Kawasaki, JP;

Assignee:

Fuji Electric Co. Ltd., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K / ;
U.S. Cl.
CPC ...
3401 / ; 3401 / ; 364564 ;
Abstract

An automated pattern inspection system comprising first means for measuring an area value of an object digitized pattern, second means for computing a first square value of a boundary length from the area value, third means for detecting a boundary of the object digitized pattern, fourth means for computing a second square value of a length of the boundary detected by the third means, fifth means for computing a subtraction value between the first square value from the second means and the second square value from the fourth means, and sixth means for comparing the subtraction value from the fifth means with a reference level, whereby a condition of defect in the pattern is evaluated. According to this invention, any defect in an object pattern, regardless of its size, can be detected with a high speed operation, since this system does not require a square root extraction process.


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