The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 1979
Filed:
Feb. 02, 1978
Applicant:
Inventors:
Assignee:
Murata Manufacturing Co., Ltd., JPX, US;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C04B / ;
U.S. Cl.
CPC ...
428432 ; 2041 / ; 252 629 ; 427100 ; 428469 ; 428539 ;
Abstract
Piezoelectric crystalline films which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of vanadium. These films are prepared by radio-frequency sputtering.