The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 1979
Filed:
Dec. 22, 1977
Joseph J Connolly, Jr, San Jose, CA (US);
Thomas M Frederiksen, San Jose, CA (US);
National Semiconductor Corporation, Santa Clara, CA (US);
Abstract
A laser beam is employed to trim monolithic integrated circuits in wafer form in a step and repeat machine. The step and repeat action is adjusted to bring successive circuits on the wafer into trimming relationship with the laser. The circuit is measured and trimming accomplished to adjust the circuit performance to a precise specification. The step and repeat operation introduces a small error that accumulates as stepping proceeds. A laser beam error detector pattern is incorporated into the integrated circuit wafer and is designed to produce a response when the beam impingement error exceeds a predetermined value. The detector output causes the laser beam to be translated by an increment equal to the error and in the opposite direction. As a result, the laser beam aiming error is controlled by a known pattern rather than by an unknown cumulative error.