The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 1979
Filed:
Mar. 31, 1978
Applicant:
Inventor:
Tadahiro Takigawa, Inagi, JP;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
2503 / ; 250311 ; 2504 / ;
Abstract
An electron beam exposure apparatus comprises a pair of electrostatic deflecting plates so disposed that the center thereof in the direction of an advancing electron beam emitted from an electron gun is located on the crossover point of said beam, a variable voltage source for said deflecting plates and an aperture disposed in the path of the deflected electron beam.