The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 1979
Filed:
May. 18, 1977
Applicant:
Inventor:
Laszlo Sipos, Saratoga, CA (US);
Assignee:
GCA Corporation, Sunnyvale, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F04B / ; F04B / ; F04B / ; F04B / ;
U.S. Cl.
CPC ...
417 63 ; 417472 ; 417430 ;
Abstract
A positive displacement flow through fluid pump especially useful for dispensing exact volumes of photoresist on a silicon wafer uses a bellows for the main pumping component. The bellows is capped at both ends and they include slugs which extend into the interior of the bellows to minimize the static volume. In addition, internal porting is provided in the slugs to effectively wash or purge the convolutions of the bellows which results in continuous cleaning.