The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 1979
Filed:
Jul. 01, 1976
Klaus Wittmaack, Munich, DE;
Gesellschaft fur Strahlen- und Umweltforschung mbH Munchen, Nuremberg, DE;
Abstract
A raster scanning ion microscope for determining, with a large field of view, the lateral distribution of elements, isotopes and compounds at the surface and in the bulk of solid specimens and for displaying the surface topography of the sample. The scanning ion microscope consists of an ion gun to produce a primary ion beam, a means to focus and raster scan the primary ion beam over the surface of the specimen, a means to form a beam of secondary ions out of all particles sputtered from the specimen, an energy analyzer and a mass spectrometer for secondary ion analysis and a means for optimum transport of the secondary ions from the specimen to the mass spectrometer. Use of a quadrupole mass filter as a mass analyzer reduces restrictions usually faced with magnetic type mass analyzer and allows imaging of the specimen with a large field of view. Moreover non-normal secondary ion extraction and/or non-normal primary ion incidence in combination with low secondary ion extraction voltages result in the capability of the instrument of displaying the surface topography of the specimen.