The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 1979
Filed:
Dec. 20, 1977
Applicant:
Inventors:
Paul M Schaible, Poughkeepsie, NY (US);
Geraldine C Schwartz, Poughkeepsie, NY (US);
Laura B Zielinski, New Fairfield, CT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ;
U.S. Cl.
CPC ...
156643 ; 156659 ; 156667 ; 156904 ; 2041 / ; 2041 / ;
Abstract
Magnesium oxide is deposited on a substrate as a mask with a pattern of openings which exposes a corresponding pattern of a surface of a substrate which is to be subjected to dry etching. In a specific application, the magnesium oxide mask is employed to delineate a conductor pattern on semiconductor substrates by dry etching.