The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 1978
Filed:
Dec. 15, 1976
Applicant:
Inventors:
Susumu Namba, Tokyo, JP;
Yoshinobu Aoyagi, Kamifukuoka, JP;
Assignee:
Rikagaku Kenkyusho, Wako, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156643 ; 156659 ; 156662 ; 156668 ; 2041 / ;
Abstract
Disclosed is a method of producing echelette gratings using a beam of electrically charged particles to bomber a masked substrate. The shape and blazed angle '.delta.' of the echelette grating is controlled by putting the substrate at a selected slant angle '.theta.' with regard to the beam of electrically charged particles.