The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1978
Filed:
Nov. 18, 1977
Applicant:
Inventor:
Warren C Rosvold, Sunnyvale, CA (US);
Assignee:
Signetics Corporation, Sunnyvale, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73727 ; 7351 / ; 338-2 ; 338 42 ; 73767 ; 73777 ;
Abstract
A semiconductor transducer chip is flip-chip bonded to a semiconductor interface chip, which is mounted on the ceramic package. Thermal coupling between the package and the transducer chip is minimized by the small contact area between the transducer chip and interface chip. Micron size spacing between the spring membrane in the transducer chip and the interface chip produces squeeze film damping of the spring membrane.