The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 1978
Filed:
Jan. 26, 1977
Applicant:
Inventors:
Katsuhisa Usami, Tokyo, JP;
Isao Ishikawa, Hino, JP;
Assignee:
Hitachi, Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M / ; H01J / ;
U.S. Cl.
CPC ...
250305 ; 250310 ;
Abstract
An electrostatic charged-particle analyzer includes a deflecting electrode system which focuses charged particles emitted from a sample by irradiating the sample with a primary beam, the particles being focused on the axis of the primary beam or on an identical circumference about the axis, and a cylindrical mirror type analyzer whose object point is the focusing point, whereby the accepted solid angle for the charged particles is made large.