The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 1978
Filed:
Aug. 18, 1977
Applicant:
Inventors:
Kiyoo Kamei, Yokohama, JP;
Toshiaki Ikoma, Tokyo, JP;
Hirokuni Tokuda, Kawasaki, JP;
Jeffrey Frey, Tokyo, JP;
Assignees:
Tokyo Shibaura Electric Co., Tokyo, JP;
Other;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
148-15 ; 148175 ; 148187 ; 156628 ; 204 / ;
Abstract
A method for manufacturing compound semiconductor devices includes a step of forming a first oxidized film on a GaAs body and heating it at a high temperature. A second oxidized film is thereafter formed on the body which includes the first oxidized film so as to change it properties, for example, to be easily etched with an etchant.