The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 1978
Filed:
Oct. 04, 1976
Gerhard Kienel, Hanau am Main, DE;
Helmut Petersein, Gelnhausen-Hochst, DE;
Leybold-Heraeus GmbH & Co. KG, Cologne, DE;
Abstract
Electron beam vaporizer having a beam generator with a heated cathode, focusing means and electromagnetic deflection means for the deflection and guidance of the beam. An exchangeable, fluid-cooled and preferably rotatable vaporizing crucible associated with the beam generator and having at least one depression in the base thereof for at least one substance to be vaporized. The crucible has passages for the flow of a coolant beneath the depression and the base of the vaporizing crucible is constructed as separate components having a common contact surface so that a removable crucible head is formed. The crucible base is closed off from its environment with regard to the flow passages.