The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 1978
Filed:
Jun. 06, 1977
Paul Tigreat, Meylan, FR;
Commissariat a l'Energie Atomique, Paris, FR;
Societe pour l'Etude et la Fabrication de Circuits Integres Speciaux, Grenoble, FR;
Abstract
A machine for drawing on a photographic plate and especially for integrated ircuit masks comprises an electro-optical imager having an optical axis x-x', means for controlling the optical state of each point which has dimensions corresponding to the smallest detail to be drawn on the plate, the entire light beam issuing from the imager being applied to an objective which provides a magnification n and has an axis corresponding to the optic axis. Means for producing the relative displacement of the imager and of the photosensitive plate in a plane at right angles to the optic axis and in two orthogonal directions are controlled as a function of indications supplied by means for measuring the relative displacement.