The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 1978
Filed:
Dec. 08, 1977
Gary Hillman, Livingston, NJ (US);
Michael Devico, Chatham, NJ (US);
Machine Technology, Inc., East Hanover, NJ (US);
Abstract
Apparatus is disclosed for automatically and simultaneously cleaning both sides of a plurality of workpieces. The workpieces are illustratively thin, fragile slices of brittle material, such as single-crystal silicon wafers. These workpieces are supplied to the cleaning apparatus within a cassette. The cleaning apparatus includes a cassette receiving station, a processing station and guide means extending from the cassette receiving station through the processing station. The guide means is adapted to receive edge portions of the workpieces. A transfer arm is extended from a retracted position through the cassette so that a first portion of the transfer arm pushes a workpiece along the guide means through the processing station. The transfer arm is then retracted and a second portion of the transfer arm pushes the workpiece along the guide means back through the processing station and into the cassette. The cassette is then moved so that the next workpiece to be processed is in position adjacent the guide means. The processing station extends on both sides of the guide means and includes a scrubbing station. In the region of the scrubbing station, the guide means is arranged so that the entire workpiece surface is exposed to the scrubbing station.