The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 1978
Filed:
Dec. 22, 1976
Applicant:
Inventor:
Homi G Sarkary, Hopewell Junction, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 68 ; 357 71 ; 357 73 ;
Abstract
In the fabrication of integrated circuits, step or ridge peak problems in forming via openings through sputtered quartz coatings to underlying metallization are minimized by subdividing the contact portions thereof into a plurality of adjacent line segments, and forming the via opening between the elevations or peaks on the line segments to expose portions thereof for interconnection by higher metallization levels.