The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 1978

Filed:

Dec. 22, 1976
Applicant:
Inventors:

Yukichi Ueno, Katsuta, JP;

Toshiaki Nakata, Katsuta, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M / ;
U.S. Cl.
CPC ...
250311 ; 250399 ; 250400 ; 2504 / ;
Abstract

Electric pulses are counted, and are converted into an electric signal proportional to the number of the counted pulses. An electron beam for irradiating a sample is deflected in response to the electric signal. The counting can be voluntarily stopped with a switch.


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