The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 1978
Filed:
Jan. 11, 1977
Howard Arthur Froot, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A rapid, non-destructive system and method for insitu detection and identification of luminescent organic particulates or films on non-luminescent devices, such as semiconductor wafers and chips. The major optical components of the system comprises a luminescent vertical illuminator, an image device and a detector. The method is based on the principle that a very large number of organic materials luminesce when excited by ultraviolet radiation. By scanning the luminescent emission spectra of the known organic materials used in manufacture, a characteristic curve of intensity versus wavelength is obtained and matched to curves of known organic materials, thereby permitting detection and identification of the particulates.