The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 1978
Filed:
Oct. 26, 1976
Applicant:
Inventor:
Georges Pircher, Paris, FR;
Assignee:
Thomson-CSF, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
355 53 ; 355 54 ; 355 79 ;
Abstract
A high-precision mask photorepeater projects the image of a mask upon a sample. The sample upon which an impression is to be made is a thin plate of semiconductor material with dimensions of the order of 10 centimeters. Each zone to be recorded is brought opposite the lens. A system of pneumatic sensors brings the center of the zone to be recorded into the correct plane and positions this zone in the focal plane of the lens.