The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 1978
Filed:
Mar. 04, 1976
Applicant:
Inventors:
Ronald D Smith, Bovingdon, EN;
Steven B Frankel, San Jose, CA (US);
John R Reeher, Los Gatos, CA (US);
Michael S Story, Los Gatos, CA (US);
Assignee:
Finnigan Corporation, Sunnyvale, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04F / ;
U.S. Cl.
CPC ...
417153 ;
Abstract
In a vacuum system a baffle-valve acts first as a baffle to reduce the backstreaming of a diffusion pump fluid into the main vacuum chamber being evacuated and secondly it can be used as a valve to provide complete isolation between the diffusion pump and the vacuum chamber. This enables the chamber to be open for service work while the diffusion pump is kept operating for rapid pump down. The foregoing dual use of the baffle/valve increases pumping efficiency because of higher conductance.