The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 1978
Filed:
Apr. 18, 1977
Applicant:
Inventors:
Paul Eckstein, Erlangen-Tennenlohe, DT;
Ottomar Jantsch, Erlangen, DT;
Bernd Reimann, Uttenreuth, DT;
Assignee:
Siemens Aktiengesellschaft, Munich, DT;
Primary Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73719 ; 73725 ; 338-4 ; 338 42 ;
Abstract
A pressure transducer of miniature design with a silicon diaphragm which is provided with a monolithic resistor arrangement, the resistance of which changes with the deformation of the diaphragm in which the diaphragm is arranged between two overload bodies, one of which rests on a support body, whose surfaces facing the diaphragm are each provided with a pressure chamber and pressure canals to obtain an overload-proof pressure transducer which is very small and can be used for measuring large pressure differences.