The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 1978

Filed:

Jul. 15, 1976
Applicant:
Inventors:

Toshinori Takagi, Nagaokakyo, JA;

Kiyoshi Morimoto, Mobara, JA;

Yukihiko Utamura, Mobara, JA;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041 / ; 136 / ; 148175 ; 156610 ; 427 39 ; 427 82 ; 427 84 ; 427 86 ;
Abstract

A method of producing a semiconductor device comprising the step of forming a laminated element film on a substrate made of a material easy to cleave and easy to dissolve in various solvents such as water by successively depositing materials of the laminated element film on the substrate by what is called the ionized-cluster-deposition process so that crystalline film layers oriented by the crystal axis of the substrate material may be made to grow on the substrate, separating the laminated element film from the substrate by dissolving the substrate material in a solvent, and forming the semiconductor device by furnishing the separated laminated element film with suitable electrodes, etc.


Find Patent Forward Citations

Takagi, Toshinori. (1978). Method of producing semiconductor device (U.S. Patent No. 4066527). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4066527

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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