The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 1978
Filed:
Dec. 17, 1975
Applicant:
Inventor:
Adir Jacob, Framingham, MA (US);
Assignee:
LFE Corportion, Waltham, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118 491 ; 427 39 ; 4272 / ;
Abstract
Disclosed are apparatus for forming dense and tightly adhering dielectric films on the surface of conductors, semiconductors, and insulators. The apparatus includes a reaction chamber into which a gas is admitted, dispersed, and subjected to a radio frequency exciting field to form a highly luminous glow discharge zone within the chamber. Another gas is admitted separately and is dispersed downstream from the glow discharge zone, immediately above the substrate to be coated.