The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1977
Filed:
Mar. 30, 1976
Applicant:
Inventors:
Akiyoshi Suzuki, Tokyo, JA;
Masao Totsuka, Ohmiya, JA;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JA;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
350 91 ; 3501 / ; 3501 / ; 350236 ; 350237 ; 356120 ; 356172 ; 356209 ;
Abstract
A device for observing an object such as, for example, a mask, wafer, and so forth to be used in a printer for IC and LSI, and including a flat reflection surface and an inclined reflection surface having a certain inclination with respect to the flat reflection surface, by which light beam reflected at the flat reflection surface is removed by filter means to make it possible to observe only the inclined reflection surface of the object.
Quick Actions:
Suzuki, Akiyoshi. (1977). Device for observing an object (U.S. Patent No. 4062623). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4062623
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile