The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 1977
Filed:
Sep. 20, 1976
Applicant:
Inventor:
John Louis Vossen, Jr, Bridgewater, NJ (US);
Assignee:
RCA Corporation, New York, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; B32B / ;
U.S. Cl.
CPC ...
2041 / ; 1791 / ; 274 38 ; 428469 ; 358256 ;
Abstract
By radio frequency sputtering hafnium films on an alumina or sapphire substrate at high deposition rates and minimum substrate target bias, improved adhesion of the hafnium films to the substrate is obtained.