The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 1977
Filed:
Sep. 01, 1976
Applicant:
Inventors:
Robert L Gerlach, Minnetonka, MN (US);
Paul W Palmberg, Bloomington, MN (US);
Assignee:
Physical Electronics Industries, Inc., Eden Prairie, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250511 ; 250513 ;
Abstract
A scanning Auger microprobe in a cylindrical mirror analyzer is provided wherein an aperture plate at the exit stage is controllably variable in aperture size and is positioned near the second order focus point and at the minimum trace of the analyzer. Control of the aperture size is provided in both an infinitely variable arrangement and in a three size exit aperture arrangement.