The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 1977
Filed:
Sep. 07, 1976
Henry Benjamin Poluzzi, Poughkeepsie, NY (US);
Anthony M Roberti, Austin, TX (US);
Wilfried Robert Romich, Wappingers Falls, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Disclosed is a chuck or handler for carrying thin, substantially planar workpieces intermediate process stations but while maintaining a clean air environment. The chuck includes a substantially planar surface having a workpiece receiving area thereon and a plurality of channels adjacent one edge of the planar surface but superimposed thereof. A conduit is in fluid communication with the channels and includes a foraminous diffuser element in the conduit to equalize the pressure of fluid entering the channels. A source of at least Class 100 air is connected to the conduit for supplying the channels with the gaseous media so that gaseous media emanating from the channels is essentially laminar and flows across the work area to create a surface attachment effect of the air or gaseous media over the workpiece on the work area. The purpose of this abstract is to enable the public and the Patent Office to determine rapidly the subject matter of the technical disclosure of the Application. This abstract is neither intended to define the invention of the Application nor is it intended to be limiting as to the scope thereof.