The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 1977
Filed:
Dec. 16, 1975
Claude le Gressus, Fontenay-le-Fleury, FR;
Daniel Massignon, Paris, FR;
Rene Sopizet, Chevilly-Larue, FR;
Commissariat a l'Energie Atomique, Paris, FR;
Abstract
A process of elementary and chemical analysis of samples by spectrum analysis of secondary electrons emitted by the sample when it is subjected to a beam of monoenergetic primary electrons concentrated on its surface is characterized in that the intensity of a beam of monoenergetic primary electrons E.sub.p emitted by an electron gun is modulated according to a sinusoidal law at a frequency .omega., in that the secondary electrons of energy E emitted by the sample are collected, in that the intensity of the collected beam is detected by generating an electric detection signal proportional to the intensity, in that the intensity of the component of the frequency .omega. of the detection signal which provides the number of secondary electrons corresponding to the said energy is measured, and, in that the value of the collection energy E is modified in order to scan the energy spectrum comprised between the values E.sub.1 and E.sub.2 so that one obtains the spectrum n(E) of the intensity of the secondary electron emission of the sample as a function of the energy E.