The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1977
Filed:
Mar. 29, 1976
Applicant:
Inventor:
William H Sehestedt, Santa Clara, CA (US);
Assignee:
Macronetics, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
5110 / ; 5110 / ;
Abstract
Apparatus is provided for beveling or rounding the edge of thin, disc-like workpieces, such as silicon wafers integrated circuit masks and the like and includes a rotatable holder for receiving and releasably holding such a workpiece and rotating the workpiece with its edge free of obstruction. A rotating grinding wheel axially parallel to the workpiece and holder and having a V-shaped circumferential groove is urged against the edge of the workpiece by resilient biasing means so that the grinding wheel will be maintained in grinding engagement with the workpiece edge during the rotation of the workpiece.