The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 1977
Filed:
Sep. 07, 1976
Applicant:
Inventors:
Robert V Lorenze, Jr, Westford, MA (US);
Miriam F Young, Dorchester, MA (US);
Assignee:
Honeywell Inc., Minneapolis, MN (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; C23F / ; C23G / ;
U.S. Cl.
CPC ...
357 30 ; 357 55 ; 51310 ; 7335 / ; 156630 ; 428137 ; 428192 ; 428201 ; 428913 ; 156645 ; 156661 ; 156656 ;
Abstract
A novel mask is used to contour the photodetector body and adhesive layer of a photodetector device on a substrate in which the mask apertures define an angle with the plane of the substrate. Air abrasion at that angle removes unwanted portions of the photodetector body and adhesive layer, leaving a contour desirable for subsequent interconnect metallization.