The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 1977
Filed:
Oct. 06, 1975
Applicant:
Inventors:
Friedrich Scheu, San Jose, CA (US);
Glenn W Weberg, Saratoga, CA (US);
Assignee:
Hewlett-Packard Company, Palo Alto, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
118 52 ; 269 21 ;
Abstract
A spinner chuck having a recessed portion for receiving non-circular substrates is used to alleviate uneven build-up of photoresist coatings applied on the substrate. Openings are disposed in the base of the recess about the periphery thereof whereby to drain off coating material spun off into the volume between the substrate and chuck sidewall defining said recess.