The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 1977
Filed:
Apr. 21, 1976
Applicant:
Inventor:
Konrad Reuschel, Vaterstetten, DT;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DT;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118-8 ; 118 49 ;
Abstract
A non-contaminating thermal stress-free reaction container for thermal deposition of elemental silicon comprised of a base plate and a tubular member placed thereon which has at least the side walls of the container composed of pure silicon.