The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 1977
Filed:
Sep. 03, 1975
Syobu Saito, Mito, JA;
Yoshio Sakitani, Katsuta, JA;
Hitachi, Ltd., , JA;
Abstract
In a sample analysis apparatus, a sample to be analyzed is irradiated by the electron beam from an electron gun, and the information obtained from the sample and characteristic of the sample is detected for the analysis of the sample. The electron gun and the sample are placed respectively in an electron gun chamber and in a sample chamber. An intermediate chamber is located between the electron gun chamber and the sample chamber. That portion of the sample chamber which contains the sample is protuberant into the intermediate chamber. The intermediate chamber is evacuated to a degree of vacuum higher than the sample chamber but lower than the electron gun chamber.