Pressure transducer

Abstract

A force measuring beam assembly for use in pressure transducers, accelerometers, load cells, or the like, is symmetrically and floatingly mounted by means of a pair of thin torsionally flexed elements which are positioned in planes perpendicular to the plane of the beam and connect diametrically opposed corners of the beam to a rigid supporting base member in such manner that the beam may be deflected in proportion to movement of the center of the beam and provide an extremely accurate and linear output signal by means of strain gauge elements secured to the beam. In one embodiment a transducer for measuring fluid pressure over a wide range of values includes a diaphragm which is concentric with the force measuring beam assembly. A rigid connection is provided between the center of the diaphragm and the center of the beam so that non-linearity effects are avoided. Preferably, the flexure support elements may be formed by electron discharge milling so that extremely thin torsionally flexible support elements are provided at each end of the beam. Non-linearity producing stresses in the connection between beam and diaphragm are avoided by first connecting the center portion of the diaphragm to a central transversely extending portion of the beam, then securing the bottom edge of the outer rim of the diaphragm to the main pressure fitting of the transducer while permitting the outer rim of the beam assembly to float with respect to the rim of the diaphragm, and then finally securing the outer rim of the beam assembly to the rim of the diaphragm.