The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 1977
Filed:
Dec. 17, 1975
Applicant:
Inventor:
Manfred R Kuehnle, Lexington, MA (US);
Assignee:
Coulter Information Systems, Inc., Bedford, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041 / ;
Abstract
A sputtering machine which has a rotary anode that is insulated from its supporting structure and maintained at a voltage differing from that of the supporting structure. Means are provided for controlling the temperature of the surface of the anode through circulating heat exchange liquid.