The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 1977
Filed:
Dec. 03, 1975
Neil D Veigel, Novi, MI (US);
Shatterproof Glass Corporation, Detroit, MI (US);
Abstract
A cathode for use in the sputter-coating of thin films of a selected coating material on glass sheets and other substrates, and means for cooling the same. The cathode is of rectangular construction including a top wall, a bottom wall and side and end walls defining a closed chamber therein. The cathode is internally cooled by circulating a cooling medium, such as oil, under a constant head pressure, through a closed system in which the cathode is interposed, and means for continuously withdrawing air and any other gases from the system such that as the oil circulates through the cathode chamber it will exert a pressure, less than atmospheric pressure, upon the walls of said cathode and thereby reduce the pressure differential across the cathode walls.